Affilication of Author(s):扬州大学
Scope of patent:电子技术
School Sign:扬州大学
Disigner of the Invention:刘洋
Patent description:基于蒙卡-有限元的MEMS器件多物理场仿真方法
Type of Patent:发明
Application Number:202411466032.0
Number of Inventors:8
Service Invention or Not:no
Application Date:2024-10-21
First Author:LY